Cleanrooms and associated controlled environments - Part 10:Classification of surface cleanliness by chemical concentration
This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with
regard to the presence of chemical compounds or elements (including molecules, ions, atoms and
particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled
environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
NOTE 1 For the purpose of this part of ISO 14644, consideration is only given to the chemical characteristics of
a particle. The physical properties of the particle are not considered and this part of ISO 14644 does not cover the
interaction between the contamination and the surface.
NOTE 2 This part of ISO 14644 does not include the contamination generation process and any time-dependent
influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation and
handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.
ΚΩΔΙΚΟΣ ΠΡΟΪΟΝΤΟΣ:
CYS EN ISO 14644-10:2013
This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with
regard to the presence of chemical compounds or elements (including molecules, ions, atoms and
particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled
environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
NOTE 1 For the purpose of this part of ISO 14644, consideration is only given to the chemical characteristics of
a particle. The physical properties of the particle are not considered and this part of ISO 14644 does not cover the
interaction between the contamination and the surface.
NOTE 2 This part of ISO 14644 does not include the contamination generation process and any time-dependent
influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation and
handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.