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  • Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments
Εικόνα της Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments

This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
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ΚΩΔΙΚΟΣ ΠΡΟΪΟΝΤΟΣ: CYS EN ISO 25178-603:2013
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This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.