Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact

This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
ΚΩΔΙΚΟΣ ΠΡΟΪΟΝΤΟΣ: CYS EN ISO 25178-604:2013
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This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.